THIN-FILM ISLAND GROWTH-KINETICS - A GRAZING-INCIDENCE SMALL-ANGLE X-RAY-SCATTERING STUDY OF GOLD ON GLASS

被引：72

作者：

LEVINE, JR ^{[1
]}

COHEN, JB ^{[1
]}

CHUNG, YW ^{[1
]}

机构：

[1] NORTHWESTERN UNIV,INST TECHNOL,MCCORMICK SCH ENGN & APPL SCI,DEPT MAT SCI & ENGN,EVANSTON,IL 60208

来源：

SURFACE SCIENCE | 1991年 / 248卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(91)90075-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The growth during deposition and during post-deposition annealing of gold islands (40-80 angstrom in diameter) on glass substrates have been examined quantitatively and in situ with grazing incidence small angle X-ray scattering (GISAXS). The average island sizes and center-to-center island spacings have been determined as a function of gold coverage and annealing time and temperature. The annealing kinetics do not exhibit a power law dependence of average island size versus time. Instead, the data is best described by a soft-impingement, diffusion-limited, island-mobility-dominated growth model. This model yields a quantitative signature that growth is a result of island mobility. The activation energy and diffusion coefficient for the island mobility growth process are found to be of the same order of magnitude as values for single atom surface diffusion.

引用

页码：215 / 224

页数：10