ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF III/V COMPOUND SEMICONDUCTORS WITH NOVEL ORGANOMETALLIC PRECURSORS

被引：84

作者：

COWLEY, AH ^{[1
]}

BENAC, BL ^{[1
]}

EKERDT, JG ^{[1
]}

JONES, RA ^{[1
]}

KIDD, KB ^{[1
]}

LEE, JY ^{[1
]}

MILLER, JE ^{[1
]}

机构：

[1] UNIV TEXAS,DEPT CHEM ENGN,AUSTIN,TX 78712

来源：

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY | 1988年 / 110卷 / 18期

关键词：

Compound Semiconductor Synthesis - Organometallic Chemical Vapor Deposition - Organometallic Precursor Compounds;

D O I：

10.1021/ja00226a051

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

收藏

页码：6248 / 6249

页数：2

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