PHOTOLUMINESCENCE DETERMINATION OF THE NITROGEN DOPING CONCENTRATION IN 6H-SIC

被引：37

作者：

HENRY, A

KORDINA, O

HALLIN, C

HEMMINGSSON, C

JANZEN, E

机构：

[1] Department of Physics and Measurement Technology, Linköping University

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 19期

关键词：

D O I：

10.1063/1.112706

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The intensity of impurity and intrinsic luminescence lines reflects the impurity doping concentration. A calibration procedure is presented for the nitrogen impurity in 6H-SiC. The calibration is valid for a large range of n-type doping from 10(14) to 10(16) cm(-3). Effects of excitation density, temperature during the photoluminescence experiments as well as the observation of acceptor related lines are discussed. (C) 1994 American Institute of Physics.

引用

页码：2457 / 2459

页数：3

共 13 条

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