ETCHBACK REGROWTH PROCESS FOR ALGAAS/GAAS SOLAR-CELL STRUCTURES

被引:7
作者
BALDUS, A [1 ]
BETT, A [1 ]
BLIESKE, U [1 ]
SULIMA, OV [1 ]
WETTLING, W [1 ]
机构
[1] FRAUNHOFER INST SOLAR ENERGY SYST,D-79100 FREIBURG,GERMANY
关键词
D O I
10.1016/0022-0248(94)00503-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The liquid phase epitaxy etchback regrowth (LPE-ER) process has been studied for the growth of AlGaAs/GaAs solar cell structures. The influence of substrate position (vertical or horizontal), melt depth, degree of saturation with As of the Ga-based melt and temperature on the grown structures was investigated. In spite of quite different growth conditions and resulting surface morphology one can reproducibly obtain high-efficiency solar cells (> 22%, AM 1.5).
引用
收藏
页码:299 / 304
页数:6
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