The liquid phase epitaxy etchback regrowth (LPE-ER) process has been studied for the growth of AlGaAs/GaAs solar cell structures. The influence of substrate position (vertical or horizontal), melt depth, degree of saturation with As of the Ga-based melt and temperature on the grown structures was investigated. In spite of quite different growth conditions and resulting surface morphology one can reproducibly obtain high-efficiency solar cells (> 22%, AM 1.5).