CHANGES IN PHASE STRUCTURE AND FORMATION OF CHEMICAL COMPOUNDS BY ION-IMPLANTATION OF TANTALUM THIN-FILMS

被引：30

作者：

WILSON, IH ^{[1
]}

GOH, KH ^{[1
]}

STEPHENS, KG ^{[1
]}

机构：

[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD,SURREY,ENGLAND

来源：

THIN SOLID FILMS | 1976年 / 33卷 / 02期

关键词：

D O I：

10.1016/0040-6090(76)90081-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：205 / 218

页数：14

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