FORMATION OF THE CESIX/SI(111) INTERFACE

被引:19
作者
MANKE, I
WEN, HJ
HOHR, A
BAUER, A
DAHNEPRIETSCH, M
KAINDL, G
机构
[1] Freie Universitaet Berlin, Berlin
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 04期
关键词
D O I
10.1116/1.587874
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The deposition of thin Ce films on Si(111) and subsequent or simultaneous annealing leads to the formation of various structurally, electronically, and chemically different CeSix phases, as revealed by scanning-tunneling microscopy, low-energy electron diffraction, and photoelectron spectroscopy. Several phases can coexist on the same sample, and with increasing annealing temperatures larger homogeneous domains are observed. This behavior is assigned to a mismatch of the lattices of the Si-rich CeSix bulk compounds with that of the Si(111) substrate surface, resulting at temperatures above 700 degrees C in the formation of a thin film of hexagonal CeSi1.67, which does not exist as a bulk compound. (C) 1995 American Vacuum Society.
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收藏
页码:1657 / 1665
页数:9
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