INSITU ION ETCHING IN A SCANNING ELECTRON-MICROSCOPE

被引：23

作者：

DHARIWAL, RS ^{[1
]}

FITCH, RK ^{[1
]}

机构：

[1] UNIV ASTON, DEPT PHYS, BIRMINGHAM B4 7ET, WARWICKSHIRE, ENGLAND

来源：

JOURNAL OF MATERIALS SCIENCE | 1977年 / 12卷 / 06期

关键词：

D O I：

10.1007/BF02426861

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1225 / 1232

页数：8

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