DRY-ETCHING FOR COHERENT REFRACTIVE MICROLENS ARRAYS

被引：79

作者：

STERN, MB

JAY, TR

机构：

来源：

OPTICAL ENGINEERING | 1994年 / 33卷 / 11期

关键词：

MICROOPTICS; PHOTOLITHOGRAPHY; MICROLENSES; DRY ETCHING TECHNIQUES;

D O I：

10.1117/12.179880

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Coherent arrays of refractive micro-optics are fabricated in the surface of silicon using a combination of lithographic and reactive-ion etching (RIE) techniques. The aspheric profile can be approximated in a stepwise manner by iterative steps of photolithography and RIE (binary optics technology), by direct etching of a preshaped polymer microlens etch mask into the substrate, or by analog etching of a lens profile directly into the substrate through a pinhole mask.

引用

页码：3547 / 3551

页数：5

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