GLANCING-INCIDENCE X-RAY-ANALYSIS OF THIN-LAYERED MATERIALS - A REVIEW

被引：68

作者：

DEBOER, DKG ^{[1
]}

LEENAERS, AJG ^{[1
]}

VANDENHOOGENHOF, WW ^{[1
]}

机构：

[1] PHILIPS ANALYT XRAY BV,7602 EA ALMELO,NETHERLANDS

来源：

X-RAY SPECTROMETRY | 1995年 / 24卷 / 03期

关键词：

D O I：

10.1002/xrs.1300240304

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

Glancing-incidence x-rays provide a wealth of possibilities for the analysis of thin layers and multilayers. This paper discusses reflectometry under both specular and non-specular conditions, and also the combination with angle-dependent x-ray fluorescence. From these measurements information can be obtained on layer thickness, interface quality and compositional depth profile. First the historical development of glancing-incidence x-ray analysis is sketched. Then tbe physical principles of the interaction of glancing-incidence x-rays with samples which may contain rough interfaces are discussed. The equipment, which allows for both x-ray fluorescence and reflectivity measurements, is also described. The possibilities are illustrated with a number of examples from the literature.

引用

页码：91 / 102

页数：12

共 59 条

[1] METHOD FOR QUANTITATIVE X-RAY-FLUORESCENCE ANALYSIS IN NANOGRAM REGION [J].