GLANCING-INCIDENCE X-RAY-ANALYSIS OF THIN-LAYERED MATERIALS - A REVIEW

被引：68

作者：

DEBOER, DKG ^{[1
]}

LEENAERS, AJG ^{[1
]}

VANDENHOOGENHOF, WW ^{[1
]}

机构：

[1] PHILIPS ANALYT XRAY BV,7602 EA ALMELO,NETHERLANDS

来源：

X-RAY SPECTROMETRY | 1995年 / 24卷 / 03期

关键词：

D O I：

10.1002/xrs.1300240304

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

Glancing-incidence x-rays provide a wealth of possibilities for the analysis of thin layers and multilayers. This paper discusses reflectometry under both specular and non-specular conditions, and also the combination with angle-dependent x-ray fluorescence. From these measurements information can be obtained on layer thickness, interface quality and compositional depth profile. First the historical development of glancing-incidence x-ray analysis is sketched. Then tbe physical principles of the interaction of glancing-incidence x-rays with samples which may contain rough interfaces are discussed. The equipment, which allows for both x-ray fluorescence and reflectivity measurements, is also described. The possibilities are illustrated with a number of examples from the literature.

引用

页码：91 / 102

页数：12

共 59 条

[41] X-RAY TOTAL-EXTERNAL-REFLECTION-BRAGG DIFFRACTION - STRUCTURAL STUDY OF THE GAAS-AL INTERFACE [J].

MARRA, WC ;

EISENBERGER, P ;

CHO, AY .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) :6927-6933

[42] CHARACTERIZATION OF SURFACES BY GRAZING X-RAY REFLECTION - APPLICATION TO STUDY OF POLISHING OF SOME SILICATE-GLASSES [J].

NEVOT, L ;

CROCE, P .

REVUE DE PHYSIQUE APPLIQUEE, 1980, 15 (03) :761-779

[43] SURFACE STUDIES OF SOLIDS BY TOTAL REFLECTION OF X-RAYS [J].

PARRATT, LG .

PHYSICAL REVIEW, 1954, 95 (02) :359-369

[44]

Prange A., 1992, ADV XRAY ANAL, V35, P899

[45]

Sakurai K, 1992, ADV XRAY ANAL, V35, P813

[46] DIFFUSE-X-RAY SCATTERING OF AMORPHOUS MULTILAYERS [J].

SALDITT, T ;

METZGER, TH ;

PEISL, J ;

JIANG, X .

JOURNAL DE PHYSIQUE III, 1994, 4 (09) :1573-1580

[47] DETERMINATION OF ROUGHNESS CORRELATIONS IN MULTILAYER FILMS FOR X-RAY MIRRORS [J].

SAVAGE, DE ;

KLEINER, J ;

SCHIMKE, N ;

PHANG, YH ;

JANKOWSKI, T ;

JACOBS, J ;

KARIOTIS, R ;

LAGALLY, MG .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (03) :1411-1424

[48] A HIGHLY SENSITIVE ENERGY-DISPERSIVE X-RAY SPECTROMETER WITH MULTIPLE TOTAL REFLECTION OF THE EXCITING BEAM [J].

SCHWENKE, H ;

KNOTH, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 193 (1-2) :239-243

[49] X-RAY AND NEUTRON-SCATTERING FROM ROUGH SURFACES [J].

SINHA, SK ;

SIROTA, EB ;

GAROFF, S ;

STANLEY, HB .

PHYSICAL REVIEW B, 1988, 38 (04) :2297-2311

[50] GLANCING-INCIDENCE X-RAY-ANALYSIS [J].

VANDENHOOGENHOF, WW ;

DEBOER, DKG .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1993, 48 (02) :277-284

← 1 2 3 4 5 6 →