RAPID THERMAL-PROCESSING SYSTEMS - A REVIEW WITH EMPHASIS ON TEMPERATURE CONTROL

被引：72

作者：

ROOZEBOOM, F ^{[1
]}

PAREKH, N ^{[1
]}

机构：

[1] PHILIPS COMPONENTS,5600 MD EINDHOVEN,NETHERLANDS

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 06期

关键词：

D O I：

10.1116/1.584902

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper highlights the basic principles of rapid thermal processing (RTP) systems and the important areas of concern. The basic system characteristics, the fundamental physics involved, and the techniques for temperature measurement and control are extensively reviewed. We summarize the options currently available for 15 RTP equipment manufacturers and point out the latest developments in RTP system design and temperature measurement. Some novel options for temperature control (optical, fiber optical, and photoacoustic) are included.

引用

页码：1249 / 1259

页数：11

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