ALPHA-PARTICLE EMISSION FROM PLATINUM AND ITS INFLUENCE ON DRAM OPERATION

被引：2

作者：

NUMATA, K ^{[1
]}

AOKI, K ^{[1
]}

FUKUDA, Y ^{[1
]}

NISHIMURA, A ^{[1
]}

SCHLEISMAN, A ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,DEPT CHEM OPERAT,DALLAS,TX 75243

来源：

ELECTRONICS LETTERS | 1993年 / 29卷 / 24期

关键词：

RADIATION HARDENING; MEMORIES;

D O I：

10.1049/el:19931403

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Ferroelectrics such as SrTiO3 have been studied as DRAM capacitor insulators. Platinum is commonly used as their electrode material. However, platinum contains the isotope Pt-190, emitting alpha particles which cause soft errors. The authors measured the alpha particle emissivity of platinum coated silicon wafers. The resultant emissivity is consistent with the calculation. The impact on DRAM operation was estimated.

引用

页码：2099 / 2100

页数：2

共 6 条

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