REVIEW OF SPUTTER NEGATIVE-ION SOURCES

被引：30

作者：

MIDDLETON, R ^{[1
]}

机构：

[1] UNIV PENN,DEPT PHYS,PHILADELPHIA,PA 19174

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1976年 / 23卷 / 02期

关键词：

D O I：

10.1109/TNS.1976.4328413

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：1098 / 1103

页数：6

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