PROPERTIES OF CARBON-FILMS BY DC PLASMA DEPOSITION

被引：14

作者：

FUJII, K

SHOHATA, N

MIKAMI, M

YONEZAWA, M

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 04期

关键词：

D O I：

10.1063/1.96168

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：370 / 372

页数：3

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