共 13 条
[1]
BERRY RW, 1968, THIN FILM TECHNOLOGY, P522
[3]
TANTALUM OXIDE CAPACITORS FOR GAAS MONOLITHIC INTEGRATED-CIRCUITS
[J].
ELECTRON DEVICE LETTERS,
1982, 3 (05)
:127-129
[4]
TA THIN-FILM CAPACITORS WITH AN AL UNDERLAY FOR HIGH-FREQUENCY APPLICATIONS
[J].
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY,
1981, 4 (01)
:140-147
[5]
HOLLAND L, 1966, VACUUM DEPOSITION TH, P450
[7]
LACHAPELLE EA, 1968, Patent No. 3387952
[8]
NICLAS KB, 1982, ISSCC DIG TECH PAP I, V25, P196
[9]
Petersen W. C., 1981, 1981 IEEE MTT-S International Microwave Symposium Digest, P354
[10]
PITETTI RC, 1971, 21ST P IEEE EL COMP, P195