SPUTTERING OF ALKALI-HALIDES UNDER ION-BOMBARDMENT

被引:17
作者
BIERSACK, JP
SANTNER, E
机构
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 198卷 / 01期
关键词
D O I
10.1016/0167-5087(82)90047-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:29 / 32
页数:4
相关论文
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[23]  
SZYMONSKI M, 1980, P S SPUTTERING, P761
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