MORPHOLOGICAL FLUCTUATION AND ELECTRICAL-PROPERTIES OF SPUTTERED HYDROGENATED SILICON

被引：15

作者：

SHIRAFUJI, J

MATSUI, H

NARUKAWA, A

INUISHI, Y

机构：

来源：

关键词：

D O I：

10.1063/1.93580

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：535 / 537

页数：3

共 11 条

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[5] PROTON MAGNETIC-RESONANCE SPECTRA OF PLASMA-DEPOSITED AMORPHOUS SI-H FILMS
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