QUANTUM DEVICE MICROFABRICATION - RESOLUTION LIMITS OF ION-BEAM PATTERNING

被引：33

作者：

SCHERER, A

ROUKES, ML

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.101876

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：377 / 379

页数：3

共 11 条

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[2]

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ROUKES, ML ;

SCHERER, A ;

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CRAIGHEAD, HG ;

RUTHEN, RM ;

BEEBE, ED ;

HARBISON, JP .

PHYSICAL REVIEW LETTERS, 1987, 59 (26) :3011-3014

[7]

ROUKES ML, UNPUB

[8] ULTRANARROW CONDUCTING CHANNELS DEFINED IN GAAS-ALGAAS BY LOW-ENERGY ION DAMAGE [J].

SCHERER, A ;

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RUTHEN, RM ;

BEEBE, ED ;

HARBISON, JP .

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[9] ONE-DIMENSIONAL CONDUCTION IN THE 2D ELECTRON-GAS OF A GAAS-ALGAS HETEROJUNCTION [J].

THORNTON, TJ ;

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DAVIES, GJ .

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