DIAMOND DEPOSITION TECHNOLOGIES

被引:106
作者
BACHMANN, PK
VANENCKEVORT, W
机构
[1] PHILIPS RES LABS, SOLID FILMS & DEPOSIT TECHNOL, W-5100 AACHEN, GERMANY
[2] DRUKKER INT BV, 5431 SH CUIJK, NETHERLANDS
关键词
D O I
10.1016/0925-9635(92)90073-W
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Over the last 10 years a wide variety of techniques for growing diamond at low pressure and low temperature has emerged from laboratories all over the world. In this article, the state-of-the-art of the major techniques is summarized. The individual methods are briefly described, references to the original articles are given and major advantages and drawbacks are listed. The article also includes the comments, remarks and discussions elucidated by the participants of the European Community Workshop European Diamond Thin Film Technologies for the Nineties throughout the Deposition Technologies session.
引用
收藏
页码:1021 / 1034
页数:14
相关论文
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