EVALUATION OF THE TI DIFFUSION PROCESS DURING FABRICATION OF TI-LINBO3 OPTICAL-WAVEGUIDES

被引:8
作者
ARMENISE, MN
CANALI, C
DESARIO, M
CARNERA, A
MAZZOLDI, P
CELOTTI, G
机构
[1] UNIV PADUA,IST FIS,I-35100 PADUA,ITALY
[2] LAMEL,CNR,BOLOGNA,ITALY
关键词
D O I
10.1016/0022-3093(82)90070-9
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:255 / 257
页数:3
相关论文
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    BURNS, WK
    KLEIN, PH
    WEST, EJ
    PLEW, LE
    [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (10) : 6175 - 6182
  • [2] Chu WK., 1978, BACKSCATTERING SPECT
  • [3] TITANIUM IN-DIFFUSED LINBO3 OPTICAL-WAVEGUIDE FABRICATION
    STULZ, LW
    [J]. APPLIED OPTICS, 1979, 18 (12): : 2041 - 2044
  • [4] TU KN, 1978, THIN FILMS INTERDIFF, pCH5