HIGH-PERFORMANCE SELF-ALIGNED SUB-100 NM METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS USING X-RAY-LITHOGRAPHY

被引：11

作者：

YANG, IY ^{[1
]}

HU, H ^{[1
]}

SU, LT ^{[1
]}

WONG, VV ^{[1
]}

BURKHARDT, M ^{[1
]}

MOON, EE ^{[1
]}

CARTER, JM ^{[1
]}

ANTONIADIS, DA ^{[1
]}

SMITH, HI ^{[1
]}

RHEE, KW ^{[1
]}

CHU, W ^{[1
]}

机构：

[1] USN,RES LAB,WASHINGTON,DC 20375

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587428

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：4051 / 4054

页数：4

相关论文

共 13 条

[1] FABRICATION OF 50 NM LINE-AND-SPACE X-RAY MASKS IN THICK AU USING A 50 KEV ELECTRON-BEAM SYSTEM
CHU, W
SMITH, HI
RISHTON, SA
KERN, DP
SCHATTENBURG, ML
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (01): : 118 - 121
[2] HU H, 1994, 1994 SYMPOSIUM ON VLSI TECHNOLOGY, P17
[3] KERN W, 1970, RCA REV, V31, P187
[4] LEE K, 1993, ROOM TEMPERATURE 0 1, P131
[5] A COMPACT, LOW-COST SYSTEM FOR SUB-100 NM X-RAY-LITHOGRAPHY
MOEL, A
SCHATTENBURG, ML
CARTER, JM
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1648 - 1651
[6] NOVEL ON-AXIS INTERFEROMETRIC ALIGNMENT METHOD WITH SUB-10-NM PRECISION
MOEL, A
MOON, EE
FRANKEL, RD
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2191 - 2194
[7] FABRICATION AND CHARACTERIZATION OF HIGH-FLATNESS MESA-ETCHED SILICON-NITRIDE X-RAY MASKS
MOEL, A
CHU, W
EARLY, K
KU, YC
MOON, EE
TSAI, F
SMITH, HI
SCHATTENBURG, ML
FUNG, CD
GRIFFITH, FW
HAAS, LE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3287 - 3291
[8] HIGH-PERFORMANCE DEVICES FOR A 0.15-MU-M CMOS TECHNOLOGY
SHAHIDI, GG
WARNOCK, J
FISCHER, S
MCFARLAND, PA
ACOVIC, A
SUBBANNA, S
GANIN, E
CRABBE, E
COMFORT, J
SUN, JYC
NING, TH
DAVARI, B
[J]. IEEE ELECTRON DEVICE LETTERS, 1993, 14 (10) : 466 - 468
[9] SU L, 1993, OPTIMIZATION SERIES, P723
[10] TAUR Y, 1993, HIGH PERFORMANCE O 1, P127