LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF ALUMINUM

[1] AYLETT MR, 1986, CHEMTRONICS, V1, P146

[2] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD - THE EFFECT OF ORGANOMETALLIC STRUCTURE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (10) : 2616 - 2619

[3] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD [J]. APPLIED PHYSICS LETTERS, 1985, 47 (05) : 538 - 540

[4] SURFACE ORGANOMETALLIC CHEMISTRY IN THE CHEMICAL VAPOR-DEPOSITION OF ALUMINUM FILMS USING TRIISOBUTYLALUMINUM - BETA-HYDRIDE AND BETA-ALKYL ELIMINATION-REACTIONS OF SURFACE ALKYL INTERMEDIATES [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1989, 111 (05) : 1634 - 1644

[5] SURFACE CHEMICAL-REACTIONS IN THE METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION OF ALUMINUM FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1920 - 1922

[6] BENT BE, 1988, MATER RES SOC S P, V101, P177

[7] THE GROWTH AND CHARACTERIZATION OF AIGAAS USING DIMETHYL ALUMINUM-HYDRIDE [J]. JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 7 - 10

[8] LASER PROJECTION PATTERNED ALUMINUM METALLIZATION FOR INTEGRATED-CIRCUIT APPLICATIONS [J]. APPLIED PHYSICS LETTERS, 1987, 50 (12) : 766 - 768

[9] LASER DIRECT WRITING OF ALUMINUM CONDUCTORS [J]. APPLIED PHYSICS LETTERS, 1988, 52 (22) : 1865 - 1867

[10] Ehrlich D.J., 1989, LASER MICROFABRICATI

[1] AYLETT MR, 1986, CHEMTRONICS, V1, P146

[2] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD - THE EFFECT OF ORGANOMETALLIC STRUCTURE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (10) : 2616 - 2619

[3] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD [J]. APPLIED PHYSICS LETTERS, 1985, 47 (05) : 538 - 540

[4] SURFACE ORGANOMETALLIC CHEMISTRY IN THE CHEMICAL VAPOR-DEPOSITION OF ALUMINUM FILMS USING TRIISOBUTYLALUMINUM - BETA-HYDRIDE AND BETA-ALKYL ELIMINATION-REACTIONS OF SURFACE ALKYL INTERMEDIATES [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1989, 111 (05) : 1634 - 1644

[5] SURFACE CHEMICAL-REACTIONS IN THE METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION OF ALUMINUM FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1920 - 1922

[6] BENT BE, 1988, MATER RES SOC S P, V101, P177

[7] THE GROWTH AND CHARACTERIZATION OF AIGAAS USING DIMETHYL ALUMINUM-HYDRIDE [J]. JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 7 - 10

[8] LASER PROJECTION PATTERNED ALUMINUM METALLIZATION FOR INTEGRATED-CIRCUIT APPLICATIONS [J]. APPLIED PHYSICS LETTERS, 1987, 50 (12) : 766 - 768

[9] LASER DIRECT WRITING OF ALUMINUM CONDUCTORS [J]. APPLIED PHYSICS LETTERS, 1988, 52 (22) : 1865 - 1867

[10] Ehrlich D.J., 1989, LASER MICROFABRICATI