MINIMIZING ERRORS OF 4 POINT PROBE MEASUREMENTS ON CIRCULAR WAFERS

[1] ACCURACY OF 4-PROBE RESISTIVITY MEASUREMENTS ON SILICON [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1962, 13 (05): : 231 - &

[2] THE POTENTIALS OF INFINITE SYSTEMS OF SOURCES AND NUMERICAL SOLUTIONS OF PROBLEMS IN SEMICONDUCTOR ENGINEERING [J]. BELL SYSTEM TECHNICAL JOURNAL, 1955, 34 (01): : 105 - 128

[3] Vaughan D E, 1961, BR J APPL PHYS, V12, P414

[1] ACCURACY OF 4-PROBE RESISTIVITY MEASUREMENTS ON SILICON [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1962, 13 (05): : 231 - &

[2] THE POTENTIALS OF INFINITE SYSTEMS OF SOURCES AND NUMERICAL SOLUTIONS OF PROBLEMS IN SEMICONDUCTOR ENGINEERING [J]. BELL SYSTEM TECHNICAL JOURNAL, 1955, 34 (01): : 105 - 128

[3] Vaughan D E, 1961, BR J APPL PHYS, V12, P414