OPTICAL MONITORING OF PHOTOACOUSTIC PULSE-PROPAGATION IN SILICON WAFERS

被引：50

作者：

SONTAG, H

TAM, AC

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 08期

关键词：

D O I：

10.1063/1.95488

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：725 / 727

页数：3

共 28 条

[1] NEW APPROACHES TO PHOTOTHERMAL SPECTROSCOPY [J].

AMER, NM .

JOURNAL DE PHYSIQUE, 1983, 44 (NC-6) :185-190

[2] TECHNIQUE FOR MEASUREMENT OF ELASTIC-CONSTANTS BY LASER ENERGY DEPOSITION [J].

CALDER, CA ;

WILCOX, WW .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1974, 45 (12) :1557-1559

[3] SCHLIEREN VISUALIZATION OF RADIATION CAUSED BY ILLUMINATION OF PLATES WITH SHORT ACOUSTICAL PULSES [J].

DRAGONETTE, LR .

JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1972, 51 (03) :920-+

[4] SENSITIVE INSITU TRACE-GAS DETECTION BY PHOTOTHERMAL DEFLECTION SPECTROSCOPY [J].

FOURNIER, D ;

BOCCARA, AC ;

AMER, NM ;

GERLACH, R .

APPLIED PHYSICS LETTERS, 1980, 37 (06) :519-521

[5] 20-MHZ ACOUSTIC-WAVES FROM PULSED THERMOELASTIC EXPANSIONS OF CONSTRAINED SURFACES [J].

GUTFELD, RJV ;

MELCHER, RL .

APPLIED PHYSICS LETTERS, 1977, 30 (06) :257-259

[6]

HUTCHINS D, 1983, IEEE ULTRASON S P, P1175

[7] LASER GENERATION AS A STANDARD ACOUSTIC SOURCE IN METALS [J].

HUTCHINS, DA ;

DEWHURST, RJ ;

PALMER, SB ;

SCRUBY, CB .

APPLIED PHYSICS LETTERS, 1981, 38 (09) :677-679

[8] ULTRASONIC MEASUREMENTS IN FINE POWDERS USING A PHOTO-ACOUSTIC PULSE-GENERATION TECHNIQUE [J].

IMAINO, W ;

TAM, AC .

APPLIED OPTICS, 1983, 22 (12) :1875-1878

[9] DEVICE IMPLICATIONS OF THE ELECTRONIC EFFECT IN THE ELASTIC-CONSTANTS OF SILICON [J].

KEYES, RW .

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1982, 29 (02) :99-103

[10] LASER-INDUCED RAYLEIGH-WAVES IN ALUMINUM [J].

LEDBETTER, HM ;

MOULDER, JC .

JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1979, 65 (03) :840-842

← 1 2 3 →