METALORGANIC MOLECULAR-BEAM EPITAXY OF STRAINED INASP/INGAASP MULTI-QUANTUM-WELLS FOR 1.3-MU-M WAVELENGTH LASER-DIODES

被引:43
作者
SUGIURA, H
MITSUHARA, M
OOHASHI, A
HIRONO, T
NAKASHIMA, K
机构
[1] NTT Opto-electronics Laboratories, Atsugi, 243-01
关键词
D O I
10.1016/0022-0248(94)00650-4
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
This paper describes the growth of both InAsP single layers and InAsP/InGaAsP multi-quantum-well (MQW) structures by metalorganic molecular beam epitaxy (MOMBE). The As/P ratio in the InAsyP1-y films is proportional to the ratio of the AsH3/PH3 supply sources. The well-number dependence of the MQWs is characterized by X-ray analysis, photoluminescence (PL), and transmission electron microscopy, revealing that the critical thickness of InAs0.5P0.5 is approximately 70 nm at 520 degrees C. The PL spectrum of an MQW with 8 nm thick InAsP well layers has a full width at half maximum (FWHM) of 4.1 meV at 4 K. The MQW lasers have a threshold current density of 0.74 kA/cm(2) with a cavity length of 300 mu m. The maximum operating temperature is as high as 145 degrees C for a 10-well MQW laser with cleaved facets.
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页码:1 / 7
页数:7
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