X-RAY PHOTOELECTRON-SPECTROSCOPY AND RAMAN-SPECTROSCOPY INVESTIGATIONS OF AMORPHOUS SIXC1-X(H) COATINGS OBTAINED BY CHEMICAL VAPOR-DEPOSITION FROM THERMALLY LABILE ORGANO-SILICON COMPOUNDS

被引:25
作者
GERAULT, JP
MORANCHO, R
CONSTANT, G
MAZEROLLES, P
EHRHARDT, JJ
ALNOT, M
机构
[1] UNIV NANCY 1,CNRS,RECH INTERACT GAZ SOLIDE LAB,F-54600 VILLERS NANCY,FRANCE
[2] UNIV TOULOUSE 3,ORGANOMET LAB,CNRS,ERA 829,F-31062 TOULOUSE,FRANCE
关键词
D O I
10.1016/0040-6090(83)90495-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:83 / 96
页数:14
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