LCVD OF TUNGSTEN MICROSTRUCTURES ON QUARTZ

被引：8

作者：

TOTH, Z

KARGL, P

GRIVAS, C

PIGLMAYER, K

SZORENYI, T

BAUERLE, D

机构：

[1] Angewandte Physik, Johannes-Kepler-Universität Linz, Linz

来源：

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY | 1992年 / 54卷 / 03期

关键词：

D O I：

10.1007/BF00325499

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The pyrolytic laser-induced chemical vapor deposition (LCVD) of tungsten microstructures in the form of spots has been investigated. Fused quartz substrates and a mixture of WF6 and H-2 have been employed in the experiments. Different shapes of spots related to different partial pressures of WF6 and H-2 have been revealed. The results can qualitatively be described by a combination of surface reactions and gas-phase reactions resulting in tungsten deposition and surface etching.

引用

页码：189 / 192

页数：4

共 6 条

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