LATERAL GROWTH-RATES IN LASER CVD OF TUNGSTEN MICROSTRUCTURES

被引：11

作者：

SZORENYI, T

PIGLMAYER, K

ZHANG, GQ

BAUERLE, D

机构：

来源：

SURFACE SCIENCE | 1988年 / 202卷 / 03期

关键词：

D O I：

10.1016/0039-6028(88)90046-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：442 / 456

页数：15

共 26 条

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[2]

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[3]

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