THERMOELECTRIC RADIATION MICROSENSORS

被引：9

作者：

ELBEL, T ^{[1
]}

POSER, S ^{[1
]}

FISCHER, H ^{[1
]}

机构：

[1] INST PHYS HOCHTECHNOL EV,D-07743 JENA,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 42卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(94)80040-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

With antimony-bismuth thin film thermopiles, a tuneable radiation microsensor has been developed. The tuneable thermopile sensor is based on variation of the heat transfer coefficient. Tuning in sensitivity and time constant is realized by a simple post-fabrication adjusting step. Sensitivity and time constant are calculated by an analytical model and compared with experimental values.

引用

收藏

页码：493 / 496

页数：4

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