ELECTROCHEMICAL STUDY OF HYPOPHOSPHITE-REDUCED ELECTROLESS COPPER DEPOSITION

被引：20

作者：

HUNG, A ^{[1
]}

OHNO, I ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,DEPT MET ENGN,MEGURO KU,TOKYO 152,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1990年 / 137卷 / 03期

关键词：

D O I：

10.1149/1.2086579

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The hypophosphite-reduced electroless copper deposition was studied by partial anodic and partial cathodic polarization curves at various pH and various concentrations of metal ions and reducing agents. For comparison, the complete bath polarization curves were also studied. Although the reaction of hypophosphite-reduced system is very complicated, it still follows the mixed potential theory. © 1990, The Electrochemical Society, Inc. All rights reserved.

引用

页码：918 / 921

页数：4

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