TECHNIQUES FOR THE CORRECTION OF TOPOGRAPHICAL EFFECTS IN SCANNING AUGER-ELECTRON MICROSCOPY

被引：56

作者：

PRUTTON, M ^{[1
]}

LARSON, LA ^{[1
]}

POPPA, H ^{[1
]}

机构：

[1] NASA,AMES RES CTR,STANFORD NASA JOINT INST SURFACE & MICROSTRUCT RES,MOFFETT FIELD,CA 94035

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 01期

关键词：

D O I：

10.1063/1.331712

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：374 / 381

页数：8

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