DEPOSITION SYSTEM FOR SEM INSITU OBSERVATION OF GROWING CRYSTALS AND THE PRELIMINARY-STUDY OF ZN VAPOR-DEPOSITION

被引：1

作者：

GONDA, T ^{[1
]}

TERANISHI, T ^{[1
]}

HIRAHARA, T ^{[1
]}

TANAKA, Y ^{[1
]}

YUMOTO, H ^{[1
]}

GOTOH, Y ^{[1
]}

机构：

[1] SCI UNIV TOKYO,FAC IND SCI & TECHNOL,NODA,CHIBA 278,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 10期

关键词：

INSITU OBSERVATION; SEM; ZN CRYSTALS; VAPOR DEPOSITION; PVD;

D O I：

10.1143/JJAP.31.3422

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An apparatus for "in situ" observation of growing crystals in scanning electron microscope (SEM) was constructed. The design of the apparatus and the preliminary study of the growth of Zn crystals were described.

引用

页码：3422 / 3423

页数：2

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