FAR-IR SPECTROSCOPIC ELLIPSOMETER

被引：20

作者：

BARTH, KL

BOHME, D

KAMARAS, K

KEILMANN, F

CARDONA, M

机构：

[1] MAX PLANCK INST FESTKORPERFORSCH,HEISENBERGSTR 1,W-7000 STUTTGART 80,GERMANY

[2] RES INST SOLID STATE PHYS,H-1525 BUDAPEST,HUNGARY

来源：

THIN SOLID FILMS | 1993年 / 234卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(93)90276-U

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have built a far-IR ellipsometer which combines the methods of Fourier transform IR (FTIR) spectroscopy and rotating analyser ellipsometry. The instrument is based on a Bruker FTIR spectrometer to which we,attached an ellipsometer chamber. The spectral range is 30-600 cm-1. A variable-temperature cryostat enables us to make low temperature measurements down to 20 K. Initial results on the pseudodielectric function of Si:P and YBa2Cu3O7 are in good agreement with literature data.

引用

页码：314 / 317

页数：4

共 12 条

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