INFRARED SPECTROSCOPIC ELLIPSOMETRY USING A FOURIER-TRANSFORM INFRARED SPECTROMETER - SOME APPLICATIONS IN THIN-FILM CHARACTERIZATION

被引：38

作者：

FERRIEU, F

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 10期

关键词：

D O I：

10.1063/1.1140554

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：3212 / 3216

页数：5

共 35 条

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