SPECTROSCOPIC ELLIPSOMETRY OF ULTRATHIN FILMS - FROM UV TO IR

被引：34

作者：

DREVILLON, B

机构：

[1] CNRS, France

来源：

THIN SOLID FILMS | 1988年 / 163卷

关键词：

D O I：

10.1016/0040-6090(88)90420-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

27

引用

收藏

页码：157 / 166

页数：10

相关论文

共 27 条

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