INFLUENCE OF THE SUBSTRATE ON THE EARLY STAGE OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON EVIDENCED BY KINETIC ELLIPSOMETRY

被引：66

作者：

ANTOINE, AM ^{[1
]}

DREVILLON, B ^{[1
]}

机构：

[1] SOLEMS SA,ZI GLAISES,F-91120 PALAISEAU,FRANCE

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 02期

关键词：

D O I：

10.1063/1.340247

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：360 / 367

页数：8

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