INFRARED ELLIPSOMETRY STUDY OF THE VIBRATIONAL PROPERTIES OF A-SI-H, A-SIC-H AND A-SIGE-H ULTRATHIN FILMS

被引：4

作者：

BENFERHAT, R

DREVILLON, B

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1987年 / 97-8卷

关键词：

D O I：

10.1016/0022-3093(87)90200-6

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：835 / 838

页数：4

共 11 条

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[8] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J].

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[9] IR SPECTROSCOPY AND STRUCTURE OF RF MAGNETRON SPUTTERED A-SIC-H FILMS [J].

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