FAST POLARIZATION MODULATED ELLIPSOMETER USING A MICROPROCESSOR SYSTEM FOR DIGITAL FOURIER-ANALYSIS

被引：156

作者：

DREVILLON, B

PERRIN, J

MARBOT, R

VIOLET, A

DALBY, JL

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1982年 / 53卷 / 07期

关键词：

D O I：

10.1063/1.1137118

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：969 / 977

页数：9

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共 14 条

[1] ABRAMOWITZ M, 1964, HDB MATH FUNCTIONS, V55, P365
[2] HIGH PRECISION SCANNING ELLIPSOMETER
ASPNES, DE
STUDNA, AA
[J]. APPLIED OPTICS, 1975, 14 (01): : 220 - 228
[3] METHODS FOR DRIFT STABILIZATION AND PHOTOMULTIPLIER LINEARIZATION FOR PHOTOMETRIC ELLIPSOMETERS AND POLARIMETERS
ASPNES, DE
STUDNA, AA
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (03) : 291 - 297
[4] Azzam RMA, 1977, ELLIPSOMETRY POLARIZ
[5] BARRELET E, 1981, P TOPICAL C APPLICAT, P259
[6] AUTOMATIC-MEASUREMENT OF THE STOKES VECTOR OF LIGHT
BOYER, GR
LAMOUROUX, BF
PRADE, BS
[J]. APPLIED OPTICS, 1979, 18 (08): : 1217 - 1219
[7] SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE
DREVILLON, B
HUC, J
LLORET, A
PERRIN, J
DEROSNY, G
SCHMITT, JPM
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 646 - 648
[8] DREVILLON B, 1981, 5TH P INT S PLASM CH, P488
[9] AN IMPROVED METHOD FOR HIGH REFLECTIVITY ELLIPSOMETRY BASED ON A NEW POLARIZATION MODULATION TECHNIQUE
JASPERSON, SN
SCHNATTERLY, SE
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1969, 40 (06) : 761 - +
[10] MODULATED ELLIPSOMETER FOR STUDYING THIN-FILM OPTICAL PROPERTIES AND SURFACE DYNAMICS
JASPERSON, SN
BURGE, DK
OHANDLEY, RC
[J]. SURFACE SCIENCE, 1973, 37 (01) : 548 - 558