MODULATED ELLIPSOMETER FOR STUDYING THIN-FILM OPTICAL PROPERTIES AND SURFACE DYNAMICS

被引：77

作者：

JASPERSON, SN

BURGE, DK

OHANDLEY, RC

机构：

[1] WORCESTER POLYTECH INST, WORCESTER, MA 01609 USA

[2] MICHELSON LAB, CHINA LAKE, CA 93555 USA

来源：

SURFACE SCIENCE | 1973年 / 37卷 / 01期

关键词：

D O I：

10.1016/0039-6028(73)90345-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：548 / 558

页数：11

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