INFRARED STRIAGRAPH TOPOGRAPHY FOR IMAGING DEFECTS IN SEMICONDUCTOR CRYSTALS

被引:3
作者
BARNS, RL
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D O I
10.1007/BF02657522
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:703 / 710
页数:8
相关论文
共 8 条
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