FORMATION OF CARBON-EXCESS SIC FROM PYROLYSIS OF CH3SICL3

被引：20

作者：

KOBAYASHI, F ^{[1
]}

IKAWA, K ^{[1
]}

IWAMOTO, K ^{[1
]}

机构：

[1] JAPAN ATOM ENERGY RES INST,NAKA,IBARAKI,JAPAN

来源：

关键词：

D O I：

10.1016/0022-0248(75)90079-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：395 / 396

页数：2

共 8 条

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[2]

FORD LH, 1972, SPECIAL CERAMICS, V5, P49

[3]

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[4] DEPOSITION AND MICROSTRUCTURE OF VAPOR-DEPOSITED SILICON CARBIDE [J].

GULDEN, TD .

[5]

GYARMATI E, 1972, JUL900RW KFA

[6] GAS PHASE DEPOSITING IN SILICON-CARBON SYSTEM [J].

NICKL, JJ ;

BRAUNMUH.CV .

JOURNAL OF THE LESS-COMMON METALS, 1971, 25 (03) :303-&

[7] FORMATION OF BETA-SIC FROM PYROLYSIS OF CH3SICL3 IN HYDROGEN [J].

VANKEMENADE, AW ;

STEMFOORT, CF .

[8]

Voice E. H., 1972, SPECIAL CERAMICS, P1