STRUCTURAL MODIFICATIONS OF SILICON-NITRIDE AS EFFECTED BY TEMPERATURE

被引:46
作者
BILLY, M
LABBE, JC
SELVARAJ, A
ROULT, G
机构
关键词
D O I
10.1016/0025-5408(83)90003-X
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:921 / 934
页数:14
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