PRODUCTION OF SEPARATION-NOZZLE SYSTEMS FOR URANIUM ENRICHMENT BY A COMBINATION OF X-RAY-LITHOGRAPHY AND GALVANOPLASTICS

被引：4

作者：

BECKER, EW

EHRFELD, W

MUNCHMEYER, D

BETZ, H

HEUBERGER, A

PONGRATZ, S

GLASHAUSER, W

MICHEL, HJ

VONSIEMENS, R

机构：

[1] FRAUNHOFER INST FESTKORPERTECHNOL,D-8000 MUNCHEN,FED REP GER

[2] SIEMENS AG,ZENT BEREICH TECH,ZENT FERTIGUNGSAUFGABEN,D-8000 MUNICH 80,FED REP GER

来源：

NATURWISSENSCHAFTEN | 1982年 / 69卷 / 11期

关键词：

D O I：

暂无

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：520 / 523

页数：4

共 5 条

[1] URANIUM ENRICHMENT BY SEPARATION-NOZZLE PROCESS [J].

BECKER, EW ;

BIER, W ;

EHRFELD, W ;

SCHUBERT, K ;

SCHUTTE, R ;

SEIDEL, D .

NATURWISSENSCHAFTEN, 1976, 63 (09) :407-411

[2] URANIUM ENRICHMENT BY THE SEPARATION NOZZLE METHOD WITHIN THE FRAMEWORK OF GERMAN-BRAZILIAN COOPERATION [J].

BECKER, EW ;

BATISTA, PN ;

VOLCKER, H .

NUCLEAR TECHNOLOGY, 1981, 52 (01) :105-114

[3]

BECKER EW, 1982, KFK3310 KERN FORSCH

[4] HIGH-RESOLUTION, STEEP PROFILE RESIST PATTERNS [J].

MORAN, JM ;

MAYDAN, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1620-1624

[5]

SPILLER E, 1977, TOPICS APPL PHYSICS, V22

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