TEM SPECIMEN HEATING DURING ION-BEAM THINNING - MICROSTRUCTURAL INSTABILITY

被引:46
作者
KIM, MJ
CARPENTER, RW
机构
[1] Arizona State Univ, Tempe, AZ, USA, Arizona State Univ, Tempe, AZ, USA
关键词
ION BEAMS - Applications - MICROSCOPES; ELECTRON;
D O I
10.1016/0304-3991(87)90031-3
中图分类号
TH742 [显微镜];
学科分类号
摘要
Experimental results are prsented to show that energy input to Au/Si interface specimens by the particle beam during 'ion' thinning is sufficient to rasie the specimen temperature to a somewhat surprising 370 degree C, and to cause microstructural instability in the form of eutectic melting and interface migration. By analysis of various possible thermal energy dissipation mechanisms it was shown that poor thermal conduction through the specimen support was responsible. The heating effects can be eliminated in the present case by the somewhat inconvenient use of a low-temperature, cooled specimen support. It is suggested that most such heating effects can be more conveniently eliminated by use of specimen supports made from high thermal conductivity materials. These measures to reduce specimen heating will become more important as particle beam thinning is increasingly applied to a wider range of less refractory materials.
引用
收藏
页码:327 / 334
页数:8
相关论文
共 11 条
  • [1] THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY
    BRAVMAN, JC
    SINCLAIR, R
    [J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01): : 53 - 61
  • [2] CHEREMISINOFF NP, 1984, HEAT TRANSFER POCKET, P19
  • [3] THE INTERGRANULAR PHASE IN HOT-PRESSED SILICON-NITRIDE .1. ELEMENTAL COMPOSITION
    CLARKE, DR
    ZALUZEC, NJ
    CARPENTER, RW
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1981, 64 (10) : 601 - 607
  • [4] SADDLE FIELD-ION SOURCE OF SPHERICAL CONFIGURATION FOR ETCHING AND THINNING APPLICATIONS
    FRANKS, J
    GHANDER, AM
    [J]. VACUUM, 1974, 24 (10) : 489 - 491
  • [5] GOLD SILICON PHASE DIAGRAM
    GERLACH, W
    GOEL, B
    [J]. SOLID-STATE ELECTRONICS, 1967, 10 (06) : 589 - &
  • [6] KIM MJ, 1986, 44TH P ANN EMSA M AL, P406
  • [7] Kubaschewsky O, 1979, METALLURGICAL THERMO, P336
  • [8] Lundquist T., UNPUB
  • [9] LUNDQUIST TR, 1986, COMMUNICATION
  • [10] NON-EQUILIBRIUM PHASE DISTRIBUTION IN AN AL-SIC COMPOSITE
    NUTT, SR
    CARPENTER, RW
    [J]. MATERIALS SCIENCE AND ENGINEERING, 1985, 75 (1-2): : 169 - 177