CALIBRATION OF AUGER-ELECTRON SPECTROMETERS FOR ENERGY AND INTENSITY MEASUREMENT

被引：1

作者：

SEAH, MP

SMITH, GC

ANTHONY, MT

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574645

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

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页码：1221 / 1222

页数：2

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[2] RESULTS OF A JOINT AUGER ESCA ROUND ROBIN SPONSORED BY ASTM-COMMITTEE-E-42-ON-SURFACE-ANALYSIS .2. AUGER RESULTS
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[6] MEASUREMENT - AES AND XPS
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[8] SEAH MP, IN PRESS J ELECTRON