共 35 条
[3]
ASMUSSEN J, 1985, Patent No. 4507588
[4]
ASMUSSEN J, 1984, 17TH AIAA JSASS DGLR
[5]
BEATTIE JR, 1982, 16TH AIAA JSASS DGLR
[6]
BOLLINGER LD, 1983, SOLID STATE TECHNOL, V26, P99
[8]
CHEMICALLY ASSISTED ION-BEAM ETCHING OF GAAS, TI, AND MO
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1983, 1 (02)
:701-704