CHARACTERIZATION OF SINGLE STEP-EDGE DEFECTS USING HE ATOM SCATTERING

被引:9
作者
HINCH, BJ
LOCK, A
TOENNIES, JP
ZHANG, G
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 05期
关键词
D O I
10.1116/1.584471
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:1260 / 1264
页数:5
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