ENHANCED COHESION OF PHOTO-OXYGENATED FULLERENE FILMS - A NEW OPPORTUNITY FOR LITHOGRAPHY

被引：39

作者：

HEBARD, AF

EOM, CB

FLEMING, RM

CHABAL, YJ

MULLER, AJ

GLARUM, SH

PIETSCH, GJ

HADDON, RC

MUJSCE, AM

PACZKOWSKI, MA

KOCHANSKI, GP

机构：

[1] AT and T Bell Laboratories, Murray Hill, 07974, NJ

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1993年 / 57卷 / 03期

关键词：

D O I：

10.1007/BF00332606

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The irradiation of sublimed fullerene (C60 and C70) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the photo-transformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated C60 retains its fcc crystal structure but with a substantial fraction of the C60 molecules modified with carbonyl (C=O) bonds.

引用

页码：299 / 303

页数：5

共 19 条

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