MEASUREMENT OF ULTRATHIN WINDOWS OF ION-IMPLANTED SILICON DETECTORS WITH LOW-ENERGY PROTON-BEAMS

被引：16

作者：

GRAHMANN, H ^{[1
]}

KALBITZER, S ^{[1
]}

机构：

[1] MAX PLANCK INST KERN PHYS, HEIDELBERG, FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS | 1976年 / 136卷 / 01期

关键词：

D O I：

10.1016/0029-554X(76)90408-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：145 / 150

页数：6

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