APPLICATION OF MOIRE TECHNIQUES IN SCANNING ELECTRON-BEAM LITHOGRAPHY AND MICROSCOPY

被引：14

作者：

SMITH, HI ^{[1
]}

CHINN, SR ^{[1
]}

DEGRAFF, PD ^{[1
]}

机构：

[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.568513

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1262 / 1265

页数：4

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